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@article{chan_laser_2011,
	title = {Laser cooling of a nanomechanical oscillator into its quantum ground state},
	volume = {478},
	copyright = {© 2011 Nature Publishing Group, a division of Macmillan Publishers Limited. All Rights Reserved.},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v478/n7367/full/nature10461.html},
	doi = {10.1038/nature10461},
	language = {en},
	number = {7367},
	urldate = {2016-09-28},
	journal = {Nature},
	author = {Chan, Jasper and Alegre, T. P. Mayer and Safavi-Naeini, Amir H. and Hill, Jeff T. and Krause, Alex and Gröblacher, Simon and Aspelmeyer, Markus and Painter, Oskar},
	month = oct,
	year = {2011},
	keywords = {Applied physics and engineering, Physics},
	pages = {89--92}
}

@article{purdy_strong_2013,
	title = {Strong {Optomechanical} {Squeezing} of {Light}},
	volume = {3},
	issn = {2160-3308},
	url = {http://link.aps.org/doi/10.1103/PhysRevX.3.031012},
	doi = {10.1103/PhysRevX.3.031012},
	language = {en},
	number = {3},
	urldate = {2016-08-20},
	journal = {Physical Review X},
	author = {Purdy, T. P. and Yu, P.-L. and Peterson, R. W. and Kampel, N. S. and Regal, C. A.},
	month = sep,
	year = {2013}
}

@article{safavi-naeini_squeezed_2013,
	title = {Squeezed light from a silicon micromechanical resonator},
	volume = {500},
	copyright = {© 2013 Nature Publishing Group, a division of Macmillan Publishers Limited. All Rights Reserved.},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v500/n7461/abs/nature12307.html},
	doi = {10.1038/nature12307},
	language = {en},
	number = {7461},
	urldate = {2016-09-29},
	journal = {Nature},
	author = {Safavi-Naeini, Amir H. and Gröblacher, Simon and Hill, Jeff T. and Chan, Jasper and Aspelmeyer, Markus and Painter, Oskar},
	month = aug,
	year = {2013},
	keywords = {Quantum metrology, Quantum optics},
	pages = {185--189}
}

@article{martin_measurement_2007,
	title = {Measurement of {Energy} {Eigenstates} by a {Slow} {Detector}},
	volume = {98},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.98.120401},
	doi = {10.1103/PhysRevLett.98.120401},
	number = {12},
	urldate = {2019-12-02},
	journal = {Physical Review Letters},
	author = {Martin, I. and Zurek, W. H.},
	month = mar,
	year = {2007},
	pages = {120401}
}

@article{reetz_analysis_2019,
	title = {Analysis of {Membrane} {Phononic} {Crystals} with {Wide} {Band} {Gaps} and {Low}-{Mass} {Defects}},
	volume = {12},
	url = {https://link.aps.org/doi/10.1103/PhysRevApplied.12.044027},
	doi = {10.1103/PhysRevApplied.12.044027},
	number = {4},
	urldate = {2019-12-15},
	journal = {Physical Review Applied},
	author = {Reetz, C. and Fischer, R. and Assumpção, G.G.T. and McNally, D.P. and Burns, P.S. and Sankey, J.C. and Regal, C.A.},
	month = oct,
	year = {2019},
	pages = {044027}
}

@article{yap_broadband_2019,
	title = {Broadband reduction of quantum radiation pressure noise via squeezed light injection},
	copyright = {2019 The Author(s), under exclusive licence to Springer Nature Limited},
	issn = {1749-4893},
	url = {https://www.nature.com/articles/s41566-019-0527-y},
	doi = {10.1038/s41566-019-0527-y},
	language = {en},
	urldate = {2019-11-19},
	journal = {Nature Photonics},
	author = {Yap, Min Jet and Cripe, Jonathan and Mansell, Georgia L. and McRae, Terry G. and Ward, Robert L. and Slagmolen, Bram J. J. and Heu, Paula and Follman, David and Cole, Garrett D. and Corbitt, Thomas and McClelland, David E.},
	month = oct,
	year = {2019},
	pages = {1--5}
}

@article{paraiso_position-squared_2015,
	title = {Position-{Squared} {Coupling} in a {Tunable} {Photonic} {Crystal} {Optomechanical} {Cavity}},
	volume = {5},
	url = {http://link.aps.org/doi/10.1103/PhysRevX.5.041024},
	doi = {10.1103/PhysRevX.5.041024},
	number = {4},
	urldate = {2016-08-31},
	journal = {Physical Review X},
	author = {Paraïso, Taofiq K. and Kalaee, Mahmoud and Zang, Leyun and Pfeifer, Hannes and Marquardt, Florian and Painter, Oskar},
	month = nov,
	year = {2015},
	pages = {041024}
}

@article{nunnenkamp_cooling_and_squeezing_2010,
	title = {Cooling and squeezing via quadratic optomechanical coupling},
	volume = {82},
	url = {https://link.aps.org/doi/10.1103/PhysRevA.82.021806},
	doi = {10.1103/PhysRevA.82.021806},
	number = {2},
	urldate = {2019-11-25},
	journal = {Physical Review A},
	author = {Nunnenkamp, A. and Børkje, K. and Harris, J. G. E. and Girvin, S. M.},
	month = aug,
	year = {2010},
	pages = {021806}
}

@article{clerk_quantum_2010,
	title = {Quantum {Measurement} of {Phonon} {Shot} {Noise}},
	volume = {104},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.104.213603},
	doi = {10.1103/PhysRevLett.104.213603},
	number = {21},
	journal = {Physical Review Letters},
	author = {Clerk, A. A. and Marquardt, Florian and Harris, J. G. E.},
	month = may,
	year = {2010},
	keywords = {Nonlinear optomechanics},
	pages = {213603}
}

@article{gangat_phonon_2011,
	title = {Phonon number quantum jumps in an optomechanical system},
	volume = {13},
	issn = {1367-2630},
	url = {http://stacks.iop.org/1367-2630/13/i=4/a=043024},
	doi = {10.1088/1367-2630/13/4/043024},
	language = {en},
	number = {4},
	journal = {New Journal of Physics},
	author = {Gangat, A. A. and Stace, T. M. and Milburn, G. J.},
	year = {2011},
	keywords = {Nonlinear optomechanics},
	pages = {043024}
}

@article{brawley_nonlinear_2016,
	title = {Nonlinear optomechanical measurement of mechanical motion},
	volume = {7},
	copyright = {2016 Nature Publishing Group},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms10988},
	doi = {10.1038/ncomms10988},
	language = {en},
	urldate = {2019-02-07},
	journal = {Nature Communications},
	author = {Brawley, G. A. and Vanner, M. R. and Larsen, P. E. and Schmid, S. and Boisen, A. and Bowen, W. P.},
	month = mar,
	year = {2016},
	pages = {10988}
}

@article{leijssen_nonlinear_2017,
	title = {Nonlinear cavity optomechanics with nanomechanical thermal fluctuations},
	volume = {8},
	copyright = {2017 The Author(s)},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms16024},
	doi = {10.1038/ncomms16024},
	language = {en},
	number = {1},
	urldate = {2019-10-22},
	journal = {Nature Communications},
	author = {Leijssen, Rick and Gala, Giada R. La and Freisem, Lars and Muhonen, Juha T. and Verhagen, Ewold},
	month = jul,
	year = {2017},
	pages = {1--10}
}

@article{matsko_electromagnetic-continuum-induced_2018,
	title = {Electromagnetic-continuum-induced nonlinearity},
	volume = {97},
	url = {https://link.aps.org/doi/10.1103/PhysRevA.97.053824},
	doi = {10.1103/PhysRevA.97.053824},
	number = {5},
	urldate = {2019-11-18},
	journal = {Physical Review A},
	author = {Matsko, Andrey B. and Vyatchanin, Sergey P.},
	month = may,
	year = {2018},
	pages = {053824}
}

@article{aggarwal_room_2018,
	title = {Room temperature optomechanical squeezing},
	url = {http://arxiv.org/abs/1812.09942},
	urldate = {2019-10-21},
	journal = {arXiv:1812.09942 [physics, physics:quant-ph]},
	author = {Aggarwal, Nancy and Cullen, Torrey and Cripe, Jonathan and Cole, Garrett D. and Lanza, Robert and Libson, Adam and Follman, David and Heu, Paula and Corbitt, Thomas and Mavalvala, Nergis},
	month = dec,
	year = {2018},
	note = {arXiv: 1812.09942},
	keywords = {Physics - Optics, Quantum Physics},
	annote = {Comment: 5 pages, 4 figures in main text. 4 pages, 5 figures in supplemental information}
}

@article{purdy_observation_2016,
	title = {Observation of {Optomechanical} {Quantum} {Correlations} at {Room} {Temperature}},
	url = {http://arxiv.org/abs/1605.05664},
	urldate = {2016-09-30},
	journal = {arXiv:1605.05664 [cond-mat, physics:physics, physics:quant-ph]},
	author = {Purdy, T. P. and Grutter, K. E. and Srinivasan, K. and Taylor, J. M.},
	month = may,
	year = {2016},
	note = {arXiv: 1605.05664},
	keywords = {Condensed Matter - Mesoscale and Nanoscale Physics, Physics - Optics, Quantum Physics},
	annote = {Comment: 13 pages, 7 figures}
}

@article{cripe_measurement_2019,
	title = {Measurement of quantum back action in the audio band at room temperature},
	volume = {568},
	copyright = {2019 The Author(s), under exclusive licence to Springer Nature Limited},
	issn = {1476-4687},
	url = {https://www.nature.com/articles/s41586-019-1051-4},
	doi = {10.1038/s41586-019-1051-4},
	language = {en},
	number = {7752},
	urldate = {2019-11-19},
	journal = {Nature},
	author = {Cripe, Jonathan and Aggarwal, Nancy and Lanza, Robert and Libson, Adam and Singh, Robinjeet and Heu, Paula and Follman, David and Cole, Garrett D. and Mavalvala, Nergis and Corbitt, Thomas},
	month = apr,
	year = {2019},
	pages = {364--367}
}

@article{sudhir_quantum_2017,
	title = {Quantum {Correlations} of {Light} from a {Room}-{Temperature} {Mechanical} {Oscillator}},
	volume = {7},
	url = {https://link.aps.org/doi/10.1103/PhysRevX.7.031055},
	doi = {10.1103/PhysRevX.7.031055},
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	journal = {Physical Review X},
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	month = sep,
	year = {2017},
	pages = {031055}
}

@article{miao_standard_2009,
	title = {Standard {Quantum} {Limit} for {Probing} {Mechanical} {Energy} {Quantization}},
	volume = {103},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.103.100402},
	doi = {10.1103/PhysRevLett.103.100402},
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	journal = {Physical Review Letters},
	author = {Miao, Haixing and Danilishin, Stefan and Corbitt, Thomas and Chen, Yanbei},
	month = sep,
	year = {2009},
	keywords = {QND measurement, membrane in the middle},
	pages = {100402}
}

@article{khalili_preparing_2010,
	title = {Preparing a {Mechanical} {Oscillator} in {Non}-{Gaussian} {Quantum} {States}},
	volume = {105},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.105.070403},
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	urldate = {2019-11-18},
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@article{bodiya_sub-hertz_2019,
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@article{bagci_optical_2014,
	title = {Optical detection of radio waves through a nanomechanical transducer},
	volume = {507},
	copyright = {© 2014 Nature Publishing Group, a division of Macmillan Publishers Limited. All Rights Reserved.},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v507/n7490/abs/nature13029.html},
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	language = {en},
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	urldate = {2016-09-28},
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	month = mar,
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	keywords = {Optomechanics},
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@article{fischer_spin_2019,
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	volume = {21},
	issn = {1367-2630},
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	url = {https://doi.org/10.1088%2F1367-2630%2Fab117a},
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	urldate = {2019-08-18},
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	copyright = {© 2014 Nature Publishing Group},
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@article{unterreithmeier_universal_2009,
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	copyright = {2009 Nature Publishing Group},
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@article{verbridge_high_2006,
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@article{sadeghi_influence_2019,
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	year = {2019},
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@article{corbitt_measurement_2006,
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@article{corbitt_optical_2007,
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	year = {2007},
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@article{rossi_measurement-based_2018,
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	volume = {563},
	copyright = {2018 Springer Nature Limited},
	issn = {1476-4687},
	url = {https://www.nature.com/articles/s41586-018-0643-8},
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	journal = {Nature},
	author = {Rossi, Massimiliano and Mason, David and Chen, Junxin and Tsaturyan, Yeghishe and Schliesser, Albert},
	month = nov,
	year = {2018},
	pages = {53}
}

@article{choi_self-similar_2017,
	title = {Self-{Similar} {Nanocavity} {Design} with {Ultrasmall} {Mode} {Volume} for {Single}-{Photon} {Nonlinearities}},
	volume = {118},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.118.223605},
	doi = {10.1103/PhysRevLett.118.223605},
	number = {22},
	journal = {Physical Review Letters},
	author = {Choi, Hyeongrak and Heuck, Mikkel and Englund, Dirk},
	month = may,
	year = {2017},
	pages = {223605}
}

@article{ligo2015,
	title = {Advanced LIGO},
	volume = {32},
	issn = {0264-9381},
	url = {http://stacks.iop.org/0264-9381/32/i=7/a=074001},
	doi = {10.1088/0264-9381/32/7/074001},
	language = {en},
	number = {7},
	urldate = {2018-11-19},
	journal = {Classical and Quantum Gravity},
	author = {The LIGO Scientific Collaboration},
	year = {2015},
	pages = {074001}
}

@article{bereyhi_clamp-tapering_2019,
	title = {Clamp-{Tapering} {Increases} the {Quality} {Factor} of {Stressed} {Nanobeams}},
	volume = {19},
	issn = {1530-6984},
	url = {https://doi.org/10.1021/acs.nanolett.8b04942},
	doi = {10.1021/acs.nanolett.8b04942},
	number = {4},
	urldate = {2019-07-13},
	journal = {Nano Letters},
	author = {Bereyhi, Mohammad. J. and Beccari, Alberto and Fedorov, Sergey A. and Ghadimi, Amir H. and Schilling, Ryan and Wilson, Dalziel J. and Engelsen, Nils J. and Kippenberg, Tobias J.},
	month = apr,
	year = {2019},
	pages = {2329--2333}
}

@article{fedorov_generalized_2019,
	title = {Generalized dissipation dilution in strained mechanical resonators},
	volume = {99},
	url = {https://link.aps.org/doi/10.1103/PhysRevB.99.054107},
	doi = {10.1103/PhysRevB.99.054107},
	number = {5},
	urldate = {2019-02-28},
	journal = {Physical Review B},
	author = {Fedorov, S. A. and Engelsen, N. J. and Ghadimi, A. H. and Bereyhi, M. J. and Schilling, R. and Wilson, D. J. and Kippenberg, T. J.},
	month = feb,
	year = {2019},
	pages = {054107}
} 

@article{ni_enhancement_2012,
	title = {Enhancement of {Mechanical} \${Q}\$ {Factors} by {Optical} {Trapping}},
	volume = {108},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.108.214302},
	doi = {10.1103/PhysRevLett.108.214302},
	number = {21},
	journal = {Physical Review Letters},
	author = {Ni, K.-K. and Norte, R. and Wilson, D. J. and Hood, J. D. and Chang, D. E. and Painter, O. and Kimble, H. J.},
	month = may,
	year = {2012},
	pages = {214302}
}

@article{gajo_strong_2017,
	title = {Strong 4-mode coupling of nanomechanical string resonators},
	volume = {111},
	issn = {0003-6951},
	url = {http://aip.scitation.org/doi/full/10.1063/1.4995230},
	doi = {10.1063/1.4995230},
	number = {13},
	urldate = {2018-01-31},
	journal = {Applied Physics Letters},
	author = {Gajo, Katrin and Schüz, Simon and Weig, Eva M.},
	month = sep,
	year = {2017},
	pages = {133109}
}

@article{capelle_polarimetric_2017,
	title = {Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride           resonators},
	volume = {110},
	issn = {0003-6951},
	url = {http://aip.scitation.org/doi/full/10.1063/1.4982876},
	doi = {10.1063/1.4982876},
	number = {18},
	urldate = {2017-12-14},
	journal = {Applied Physics Letters},
	author = {Capelle, T. and Tsaturyan, Y. and Barg, A. and Schliesser, A.},
	month = may,
	year = {2017},
	pages = {181106}
}

@article{ghadimi_radiation_2017,
	title = {Radiation and {Internal} {Loss} {Engineering} of {High}-{Stress} {Silicon} {Nitride} {Nanobeams}},
	issn = {1530-6984},
	url = {http://dx.doi.org/10.1021/acs.nanolett.7b00573},
	doi = {10.1021/acs.nanolett.7b00573},
	urldate = {2017-05-13},
	journal = {Nano Letters},
	author = {Ghadimi, Amir Hossein and Wilson, Dalziel Joseph and Kippenberg, Tobias J.},
	month = mar,
	year = {2017}
}

@article{reinhardt_ultralow-noise_2016,
	title = {Ultralow-{Noise} {SiN} {Trampoline} {Resonators} for {Sensing} and {Optomechanics}},
	volume = {6},
	url = {http://link.aps.org/doi/10.1103/PhysRevX.6.021001},
	doi = {10.1103/PhysRevX.6.021001},
	number = {2},
	urldate = {2016-09-19},
	journal = {Physical Review X},
	author = {Reinhardt, Christoph and Müller, Tina and Bourassa, Alexandre and Sankey, Jack C.},
	month = apr,
	year = {2016},
	keywords = {SiN damping},
	pages = {021001}
}

@article{tsaturyan_ultracoherent_2017,
	title = {Ultracoherent nanomechanical resonators via soft clamping and dissipation dilution},
	volume = {12},
	copyright = {2017 Nature Publishing Group},
	issn = {1748-3395},
	url = {https://www.nature.com/articles/nnano.2017.101},
	doi = {10.1038/nnano.2017.101},
	language = {En},
	number = {8},
	urldate = {2017-12-01},
	journal = {Nature Nanotechnology},
	author = {Tsaturyan, Y. and Barg, A. and Polzik, E. S. and Schliesser, A.},
	month = aug,
	year = {2017},
	pages = {776},
}


@article{Purdy13b,
	Author = {Purdy, T P and Yu, P and Peterson, R W and Kampel, N S and Regal, C A},
	Date-Added = {2017-04-18 19:38:55 +0000},
	Date-Modified = {2017-04-18 19:39:00 +0000},
	Doi = {10.1103/PhysRevX.3.031012},
	File = {Purdy et al. - 2013 - Physical Review X:/Users/vivisheksudhir/Documents/Papers/Zotero/storage/BGDEDS99/Purdy et al. - 2013 - Physical Review X.pdf:application/pdf},
	Journal = {Physical Review X},
	Keywords = {optomechanics, squeezed state},
	Pages = {031012},
	Title = {Strong {Optomechanical} {Squeezing} of {Light}},
	Volume = {3},
	Year = {2013},
	Bdsk-Url-1 = {http://dx.doi.org/10.1103/PhysRevX.3.031012}} 

@article{saulson_thermal_1990,
	Author = {Saulson, Peter R},
	Date-Added = {2017-01-20 13:44:45 +0000},
	Date-Modified = {2017-01-20 13:44:45 +0000},
	File = {Saulson - 1990 - Physical Review D:/Users/vivisheksudhir/Documents/Papers/Zotero/storage/PHHA4NPW/Saulson - 1990 - Physical Review D.pdf:application/pdf},
	Journal = {Physical Review D},
	Month = feb,
	Pages = {2437--2445},
	Title = {Thermal noise in mechanical experiments},
	Url = {http://journals.aps.org/prd/abstract/10.1103/PhysRevD.42.2437},
	Volume = {42},
	Year = {1990},
	Bdsk-Url-1 = {http://journals.aps.org/prd/abstract/10.1103/PhysRevD.42.2437}}

@article{gonzalez_brownian_1995,
	Abstract = {We constructed a torsion pendulum in which the dissipation is dominated by internal friction in the fiber. We compare the measured thermal noise spectrum with the prediction from the fluctuation-dissipation theorem. The agreement is excellent. The spectrum exhibits an approximately 1f slope below resonance. We discuss the implications for interferometric gravitational wave detectors.},
	Author = {Gonz{\'a}lez, Gabriela I. and Saulson, Peter R.},
	Doi = {10.1016/0375-9601(95)00194-8},
	Issn = {0375-9601},
	Journal = {Physics Letters A},
	Month = may,
	Number = {1},
	Pages = {12--18},
	Title = {Brownian motion of a torsion pendulum with internal friction},
	Url = {http://www.sciencedirect.com/science/article/pii/0375960195001948},
	Urldate = {2016-12-07},
	Volume = {201},
	Year = {1995},
	Bdsk-Url-1 = {http://www.sciencedirect.com/science/article/pii/0375960195001948},
	Bdsk-Url-2 = {http://dx.doi.org/10.1016/0375-9601(95)00194-8}}

@article{gonzalez_brownian_1994,
	Abstract = {The theory of elasticity and the fluctuation‐dissipation theorem were used to calculate the thermal noise power spectrum of an extended mass suspended by an anelastic wire. The implications for interferometric detectors of gravitational waves are discussed.},
	Author = {Gonz{\'a}lez, Gabriela I. and Saulson, Peter R.},
	Date-Modified = {2017-01-20 19:40:31 +0000},
	Doi = {10.1121/1.410467},
	Journal = {The Journal of the Acoustical Society of America},
	Journaltitle = {The Journal of the Acoustical Society of America},
	Pages = {207--212},
	Title = {Brownian motion of a mass suspended by an anelastic wire},
	Url = {http://scitation.aip.org/content/asa/journal/jasa/96/1/10.1121/1.410467},
	Volume = {96},
	Year = {1994},
	Bdsk-Url-1 = {http://scitation.aip.org/content/asa/journal/jasa/96/1/10.1121/1.410467},
	Bdsk-Url-2 = {http://dx.doi.org/10.1121/1.410467}}


@article{aspelmeyer_cavity_2014,
	Author = {Aspelmeyer, Markus and Kippenberg, Tobias J. and Marquardt, Florian},
	Date-Modified = {2017-01-20 19:32:20 +0000},
	Doi = {10.1103/RevModPhys.86.1391},
	Journal = {Reviews of Modern Physics},
	Number = {4},
	Pages = {1391},
	Shortjournal = {Rev. Mod. Phys.},
	Title = {Cavity optomechanics},
	Url = {http://link.aps.org/doi/10.1103/RevModPhys.86.1391},
	Volume = {86},
	Year = {2014},
	Bdsk-Url-1 = {http://link.aps.org/doi/10.1103/RevModPhys.86.1391},
	Bdsk-Url-2 = {http://dx.doi.org/10.1103/RevModPhys.86.1391}}


@article{wilson_measurement-based_2015,
	Author = {Wilson, D. J. and Sudhir, V. and Piro, N. and Schilling, R. and Ghadimi, A. and Kippenberg, T. J.},
	Date-Modified = {2017-01-20 19:33:38 +0000},
	Doi = {10.1038/nature14672},
	Journal = {Nature},
	Journaltitle = {Nature},
	Number = {7565},
	Pages = {325},
	Title = {Measurement-based control of a mechanical oscillator at its thermal decoherence rate},
	Url = {http://www.nature.com/nature/journal/v524/n7565/full/nature14672.html},
	Volume = {524},
	Year = {2015},
	Bdsk-Url-1 = {http://www.nature.com/nature/journal/v524/n7565/full/nature14672.html},
	Bdsk-Url-2 = {http://dx.doi.org/10.1038/nature14672}}



@article{schilling_near-field_2016,
	Author = {Schilling, R. and Sch{\"u}tz, H. and Ghadimi, A. H. and Sudhir, V. and Wilson, D. J. and Kippenberg, T. J.},
	Date-Modified = {2017-01-20 19:40:55 +0000},
	Doi = {10.1103/PhysRevApplied.5.054019},
	Journal = {Physical Review Applied},
	Number = {5},
	Pages = {054019},
	Title = {Near-Field Integration of a {SiN} Nanobeam and a \$\{{\textbackslash}mathrm\{{SiO}\}\}\_\{2\}\$ Microcavity for Heisenberg-Limited Displacement Sensing},
	Url = {http://link.aps.org/doi/10.1103/PhysRevApplied.5.054019},
	Volume = {5},
	Year = {2016},
	Bdsk-Url-1 = {http://link.aps.org/doi/10.1103/PhysRevApplied.5.054019},
	Bdsk-Url-2 = {http://dx.doi.org/10.1103/PhysRevApplied.5.054019}}

@article{villanueva_surface_loss_2014,
	Author = {Villanueva, L. G. and Schmid, S.},
	Date-Modified = {2017-01-20 19:39:27 +0000},
	Doi = {10.1103/PhysRevLett.113.227201},
	Journal = {Physical Review Letters},
	Number = {22},
	Pages = {227201},
	Shortjournal = {Phys. Rev. Lett.},
	Title = {Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in {SiN} Micro- and Nanomechanical Resonators},
	Url = {http://link.aps.org/doi/10.1103/PhysRevLett.113.227201},
	Volume = {113},
	Year = {2014},
	Bdsk-Url-1 = {http://link.aps.org/doi/10.1103/PhysRevLett.113.227201},
	Bdsk-Url-2 = {http://dx.doi.org/10.1103/PhysRevLett.113.227201}}


@article{ghadimi_strain_2017,
	title = {Elastic strain engineering for ultralow mechanical dissipation},
	volume = {360},
	copyright = {Copyright © 2018 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. http://www.sciencemag.org/about/science-licenses-journal-article-reuseThis is an article distributed under the terms of the Science Journals Default License.},
	issn = {0036-8075, 1095-9203},
	url = {http://science.sciencemag.org/content/360/6390/764},
	doi = {10.1126/science.aar6939},
	language = {en},
	number = {6390},
	urldate = {2018-05-18},
	journal = {Science},
	author = {Ghadimi, A. H. and Fedorov, S. A. and Engelsen, N. J. and Bereyhi, M. J. and Schilling, R. and Wilson, D. J. and Kippenberg, T. J.},
	month = may,
	year = {2018},
	pmid = {29650701},
	pages = {764--768}
}

@book{landau_theory_1970,
	title = {Theory of elasticity},
	url = {https://trove.nla.gov.au/work/14292840},
	abstract = {A comprehensive textbook covering not only the ordinary theory of the deformation of solids, but also some topics not usually found in textbooks on the subject, such as thermal conduction and viscosity in solids.},
	urldate = {2017-12-15},
	publisher = {London Pergamon Press},
	author = {Landau, L. D. and Lifshitz, E. M.},
	year = {1970},
	keywords = {Conjugate variables (thermodynamics), Elasticity (physics), Föppl–von Kármán equations, Helmholtz free energy, Internal energy, Kinetic theory of solids, Lev Landau, Linear elasticity, Solid mechanics},
}

@article{yu_control_2012,
	title = {Control of {Material} {Damping} in {High}-\${Q}\$ {Membrane} {Microresonators}},
	volume = {108},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.108.083603},
	doi = {10.1103/PhysRevLett.108.083603},
	abstract = {We study the mechanical quality factors of bilayer aluminum–silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q’s of tensioned resonator modes over a large range of frequencies. We develop a theoretical model that interprets our results and predicts the damping can be reduced significantly by patterning the metal film. Using such patterning, we fabricate Al-Si3N4 membranes with ultrahigh Q at room temperature. Our work elucidates the role of material loss in the Q of membrane resonators and informs the design of hybrid mechanical oscillators for optical-electrical-mechanical quantum interfaces.},
	number = {8},
	urldate = {2018-02-21},
	journal = {Physical Review Letters},
	author = {Yu, P.-L. and Purdy, T. P. and Regal, C. A.},
	month = feb,
	year = {2012},
	pages = {083603}
}

@article{gretarsson_dissipation_1999,
	title = {Dissipation of mechanical energy in fused silica fibers},
	volume = {70},
	issn = {0034-6748},
	url = {http://aip.scitation.org/doi/abs/10.1063/1.1150040},
	doi = {10.1063/1.1150040},
	number = {10},
	urldate = {2018-02-21},
	journal = {Review of Scientific Instruments},
	author = {Gretarsson, Andri M. and Harry, Gregory M.},
	month = sep,
	year = {1999},
	pages = {4081--4087}
}

@article{zwickl_high_2008,
	title = {High quality mechanical and optical properties of commercial silicon nitride membranes},
	volume = {92},
	issn = {0003-6951},
	url = {https://aip.scitation.org/doi/10.1063/1.2884191},
	doi = {10.1063/1.2884191},
	number = {10},
	urldate = {2018-05-09},
	journal = {Applied Physics Letters},
	author = {Zwickl, B. M. and Shanks, W. E. and Jayich, A. M. and Yang, C. and Bleszynski Jayich, A. C. and Thompson, J. D. and Harris, J. G. E.},
	month = mar,
	year = {2008},
	pages = {103125}
}

@book{braginsky_systems_1985,
	title = {Systems with Small Dissipation},
	url = {http://www.press.uchicago.edu/ucp/books/book/chicago/S/bo5973099.html},
	abstract = {Electromagnetic and mechanical oscillators are crucial in such diverse fields as electrical engineering, microwave technology, optical technology, and experimental physics. For example, such oscillators are the key elements in instruments for detecting extremely weak mechanical forces and electromagnetic signals are essential to highly stable standards of time and frequency. The central problem in developing such instruments is to construct oscillators that are as perfectly simple harmonic as possible; the largest obstacle is the oscillator's dissipation and the fluctuating forces associated with it. This book, first published in Russian in 1981 and updated with new data for this English edition, is a treatise on the sources of dissipation and other defects in mechanical and electromagnetic oscillators and on practical techniques for minimizing such defects. Written by a team of researchers from Moscow State University who are leading experts in the field, the book is a virtual encyclopedia of theoretical formulas, experimental techniques, and practical lore derived from twenty-five years of experience. Intended for the experimenter who wishes to construct near-perfect instrumentation, the book provides information on everything from the role of phonon-phonon scattering as a fundamental source of dissipation to the effectiveness of a thin film of pork fat in reducing the friction between a support wire and a mechanically oscillating sapphire crystal. The researchers that V. B. Braginsky has led since the mid-1960s are best known in the West for their contributions to the technology of gravitational-wave detection, their experimental search for quarks, their test of the equivalency principle, and their invention of new experimental techniques for high-precision measurement, including "quantum nondemolition movements." Here, for the first time, they provide a thorough overview of the practical knowledge and experimental methods that have earned them a worldwide reputation for ingenuity, talent, and successful technique.},
	urldate = {2018-04-04},
	publisher = {University of Chicago Press},
	author = {Braginsky, V. B. and Mitrofanov, V. P. and Panov, V. I.},
	year = {1985}
}


@article{thompson_strong_2008,
	title = {Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane},
	volume = {452},
	copyright = {© 2008 Nature Publishing Group},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v452/n7183/abs/nature06715.html},
	doi = {10.1038/nature06715},
	abstract = {Macroscopic mechanical objects and electromagnetic degrees of freedom can couple to each other through radiation pressure. Optomechanical systems in which this coupling is sufficiently strong are predicted to show quantum effects and are a topic of considerable interest. Devices in this regime would offer new types of control over the quantum state of both light and matter, and would provide a new arena in which to explore the boundary between quantum and classical physics. Experiments so far have achieved sufficient optomechanical coupling to laser-cool mechanical devices, but have not yet reached the quantum regime. The outstanding technical challenge in this field is integrating sensitive micromechanical elements (which must be small, light and flexible) into high-finesse cavities (which are typically rigid and massive) without compromising the mechanical or optical properties of either. A second, and more fundamental, challenge is to read out the mechanical element{\textbar}[rsquo]{\textbar}s energy eigenstate. Displacement measurements (no matter how sensitive) cannot determine an oscillator{\textbar}[rsquo]{\textbar}s energy eigenstate, and measurements coupling to quantities other than displacement have been difficult to realize in practice. Here we present an optomechanical system that has the potential to resolve both of these challenges. We demonstrate a cavity which is detuned by the motion of a 50-nm-thick dielectric membrane placed between two macroscopic, rigid, high-finesse mirrors. This approach segregates optical and mechanical functionality to physically distinct structures and avoids compromising either. It also allows for direct measurement of the square of the membrane{\textbar}[rsquo]{\textbar}s displacement, and thus in principle the membrane{\textbar}[rsquo]{\textbar}s energy eigenstate. We estimate that it should be practical to use this scheme to observe quantum jumps of a mechanical system, an important goal in the field of quantum measurement.},
	language = {en},
	number = {7183},
	urldate = {2016-12-02},
	journal = {Nature},
	author = {Thompson, J. D. and Zwickl, B. M. and Jayich, A. M. and Marquardt, Florian and Girvin, S. M. and Harris, J. G. E.},
	month = mar,
	year = {2008},
	pages = {72--75}
}

@article{wilson_cavity_2009,
	title = {Cavity {Optomechanics} with {Stoichiometric} {SiN} {Films}},
	volume = {103},
	url = {http://link.aps.org/doi/10.1103/PhysRevLett.103.207204},
	doi = {10.1103/PhysRevLett.103.207204},
	abstract = {We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators’ quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Qm and frequency νm reaching Qmνm≃2×1013 Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n)≲10−5 at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.},
	number = {20},
	urldate = {2016-12-22},
	journal = {Physical Review Letters},
	author = {Wilson, D. J. and Regal, C. A. and Papp, S. B. and Kimble, H. J.},
	month = nov,
	year = {2009},
	pages = {207204}
}

@article{purdy_observation_2013,
	title = {Observation of {Radiation} {Pressure} {Shot} {Noise} on a {Macroscopic} {Object}},
	volume = {339},
	copyright = {Copyright © 2013, American Association for the Advancement of Science},
	issn = {0036-8075, 1095-9203},
	url = {http://science.sciencemag.org/content/339/6121/801},
	doi = {10.1126/science.1231282},
	abstract = {The quantum mechanics of position measurement of a macroscopic object is typically inaccessible because of strong coupling to the environment and classical noise. In this work, we monitor a mechanical resonator subject to an increasingly strong continuous position measurement and observe a quantum mechanical back-action force that rises in accordance with the Heisenberg uncertainty limit. For our optically based position measurements, the back-action takes the form of a fluctuating radiation pressure from the Poisson-distributed photons in the coherent measurement field, termed radiation pressure shot noise. We demonstrate a back-action force that is comparable in magnitude to the thermal forces in our system. Additionally, we observe a temporal correlation between fluctuations in the radiation force and in the position of the resonator.
A light, visible-to-the-naked-eye membrane is observed to fluctuate in step with the photons used to measure its position. [Also see Perspective by Milburn]
A light, visible-to-the-naked-eye membrane is observed to fluctuate in step with the photons used to measure its position. [Also see Perspective by Milburn]},
	language = {en},
	number = {6121},
	urldate = {2016-09-05},
	journal = {Science},
	author = {Purdy, T. P. and Peterson, R. W. and Regal, C. A.},
	month = feb,
	year = {2013},
	pmid = {23413350},
	pages = {801--804}
}

@article{wilson_measurement-based_2015,
	title = {Measurement-based control of a mechanical oscillator at its thermal decoherence rate},
	volume = {524},
	copyright = {© 2015 Nature Publishing Group, a division of Macmillan Publishers Limited. All Rights Reserved.},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v524/n7565/full/nature14672.html},
	doi = {10.1038/nature14672},
	abstract = {In real-time quantum feedback protocols, the record of a continuous measurement is used to stabilize a desired quantum state. Recent years have seen successful applications of these protocols in a variety of well-isolated micro-systems, including microwave photons and superconducting qubits. However, stabilizing the quantum state of a tangibly massive object, such as a mechanical oscillator, remains very challenging: the main obstacle is environmental decoherence, which places stringent requirements on the timescale in which the state must be measured. Here we describe a position sensor that is capable of resolving the zero-point motion of a solid-state, 4.3-megahertz nanomechanical oscillator in the timescale of its thermal decoherence, a basic requirement for real-time (Markovian) quantum feedback control tasks, such as ground-state preparation. The sensor is based on evanescent optomechanical coupling to a high-Q microcavity, and achieves an imprecision four orders of magnitude below that at the standard quantum limit for a weak continuous position measurement—a 100-fold improvement over previous reports—while maintaining an imprecision–back-action product that is within a factor of five of the Heisenberg uncertainty limit. As a demonstration of its utility, we use the measurement as an error signal with which to feedback cool the oscillator. Using radiation pressure as an actuator, the oscillator is cold damped with high efficiency: from a cryogenic-bath temperature of 4.4 kelvin to an effective value of 1.1 ± 0.1 millikelvin, corresponding to a mean phonon number of 5.3 ± 0.6 (that is, a ground-state probability of 16 per cent). Our results set a new benchmark for the performance of a linear position sensor, and signal the emergence of mechanical oscillators as practical subjects for measurement-based quantum control.},
	language = {en},
	number = {7565},
	urldate = {2016-09-28},
	journal = {Nature},
	author = {Wilson, D. J. and Sudhir, V. and Piro, N. and Schilling, R. and Ghadimi, A. and Kippenberg, T. J.},
	month = aug,
	year = {2015},
	keywords = {NEMS, Quantum metrology, Quantum optics},
	pages = {325--329}
}

@article{regal_measuring_2008,
	title = {Measuring nanomechanical motion with a microwave cavity interferometer},
	volume = {4},
	copyright = {2008 Nature Publishing Group},
	issn = {1745-2481},
	url = {https://www.nature.com/articles/nphys974},
	doi = {10.1038/nphys974},
	abstract = {A mechanical resonator is a physicist’s most tangible example of a harmonic oscillator. With the advent of micro and nanoscale mechanical resonators, researchers are rapidly progressing towards a tangible harmonic oscillator with motion that requires a quantum description. Challenges include freezing out the thermomechanical motion to leave only zero-point quantum fluctuations δxzp and, equally importantly, realizing a Heisenberg-limited displacement detector. Here, we introduce a detector that can be in principle quantum limited and is also capable of efficiently coupling to the motion of small-mass, nanoscale objects, which have the most accessible zero-point motion. Specifically, we measure the displacement of a nanomechanical beam using a superconducting transmission-line microwave cavity. We realize excellent mechanical force sensitivity (3 aN Hz−1/2), detect thermal motion at tens of millikelvin temperatures and achieve a displacement imprecision of 30 times the standard quantum limit.},
	language = {en},
	number = {7},
	urldate = {2018-04-10},
	journal = {Nature Physics},
	author = {Regal, C. A. and Teufel, J. D. and Lehnert, K. W.},
	month = jul,
	year = {2008},
	pages = {555--560}
}

@article{lee_measurement_2008,
	title = {Measurement of the {Elastic} {Properties} and {Intrinsic} {Strength} of {Monolayer} {Graphene}},
	volume = {321},
	copyright = {American Association for the Advancement of Science},
	issn = {0036-8075, 1095-9203},
	url = {http://science.sciencemag.org/content/321/5887/385},
	doi = {10.1126/science.1157996},
	abstract = {We measured the elastic properties and intrinsic breaking strength of free-standing monolayer graphene membranes by nanoindentation in an atomic force microscope. The force-displacement behavior is interpreted within a framework of nonlinear elastic stress-strain response, and yields second- and third-order elastic stiffnesses of 340 newtons per meter (N m–1) and –690 Nm–1, respectively. The breaking strength is 42 N m–1 and represents the intrinsic strength of a defect-free sheet. These quantities correspond to a Young's modulus of E = 1.0 terapascals, third-order elastic stiffness of D = –2.0 terapascals, and intrinsic strength of σint = 130 gigapascals for bulk graphite. These experiments establish graphene as the strongest material ever measured, and show that atomically perfect nanoscale materials can be mechanically tested to deformations well beyond the linear regime.
Measurements of the elastic properties of graphene agree with calculations for a defect-free material and show that it is indeed stronger than other materials.
Measurements of the elastic properties of graphene agree with calculations for a defect-free material and show that it is indeed stronger than other materials.},
	language = {en},
	number = {5887},
	urldate = {2018-04-10},
	journal = {Science},
	author = {Lee, Changgu and Wei, Xiaoding and Kysar, Jeffrey W. and Hone, James},
	month = jul,
	year = {2008},
	pmid = {18635798},
	keywords = {2D materials, stress/strain engineering},
	pages = {385--388}
}

@article{schmid_damping_2011,
	title = {Damping mechanisms in high-\${Q}\$ micro and nanomechanical string resonators},
	volume = {84},
	url = {https://link.aps.org/doi/10.1103/PhysRevB.84.165307},
	doi = {10.1103/PhysRevB.84.165307},
	number = {16},
	journal = {Physical Review B},
	author = {Schmid, S. and Jensen, K. D. and Nielsen, K. H. and Boisen, A.},
	month = oct,
	year = {2011},
	pages = {165307}
}

@article{yamaguchi2017gaas,
	title={GaAs-based micro/nanomechanical resonators},
	author={Yamaguchi, Hiroshi},
	journal={Semiconductor Science and Technology},
	volume={32},
	number={10},
	pages={103003},
	year={2017},
	publisher={IOP Publishing},
	url={http://iopscience.iop.org/article/10.1088/1361-6641/aa857a/meta}
}

@article{cole2014tensile,
	title={Tensile-strained InxGa1- xP membranes for cavity optomechanics},
	author={Cole, Garrett D and Yu, Pen-Li and G{\"a}rtner, Claus and Siquans, Karoline and Moghadas Nia, Ramon and Schm{\"o}le, Jonas and Hoelscher-Obermaier, Jason and Purdy, Thomas P and Wieczorek, Witlef and Regal, Cindy A and others},
	journal={App. Phys. Lett.},
	volume={104},
	number={20},
	pages={201908},
	year={2014},
	publisher={AIP},
	url = {http://aip.scitation.org/doi/abs/10.1063/1.4879755}
}


@article{zabel_top-down_2017,
	title = {Top-down method to introduce ultra-high elastic strain},
	volume = {32},
	issn = {0884-2914, 2044-5326},
	url = {https://www.cambridge.org/core/journals/journal-of-materials-research/article/div-classtitletop-down-method-to-introduce-ultra-high-elastic-straindiv/890627230AABEAD8FC0B49DC2612A261},
	doi = {10.1557/jmr.2017.31},
	language = {en},
	number = {4},
	urldate = {2018-05-15},
	journal = {Journal of Materials Research},
	author = {Zabel, Thomas and Geiger, Richard and Marin, Esteban and Müller, Elisabeth and Diaz, Ana and Bonzon, Christopher and Süess, Martin J. and Spolenak, Ralph and Faist, Jérôme and Sigg, Hans},
	month = feb,
	year = {2017},
	keywords = {semiconducting, stress/strain engineering, elastic properties, microstructure},
	pages = {726--736}
}

@article{minamisawa_top-down_2012,
	title = {Top-down fabricated silicon nanowires under tensile elastic strain up to 4.5\%},
	volume = {3},
	copyright = {2012 Nature Publishing Group},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms2102},
	doi = {10.1038/ncomms2102},
	language = {en},
	urldate = {2018-05-15},
	journal = {Nature Communications},
	author = {Minamisawa, R. A. and Süess, M. J. and Spolenak, R. and Faist, J. and David, C. and Gobrecht, J. and Bourdelle, K. K. and Sigg, H.},
	month = oct,
	year = {2012},
	keywords = {stress/strain engineering},
	pages = {1096}
}

@article{moridi_residual_2013,
	title = {Residual stresses in thin film systems: {Effects} of lattice mismatch, thermal mismatch and interface dislocations},
	volume = {50},
	issn = {0020-7683},
	shorttitle = {Residual stresses in thin film systems},
	url = {http://www.sciencedirect.com/science/article/pii/S0020768313002722},
	doi = {10.1016/j.ijsolstr.2013.06.022},
	number = {22},
	urldate = {2018-05-15},
	journal = {International Journal of Solids and Structures},
	author = {Moridi, Alireza and Ruan, Haihui and Zhang, L. C. and Liu, Mei},
	month = oct,
	year = {2013},
	pages = {3562--3569}
}

@article{corbitt_optical_2007,
	title = {Optical {Dilution} and {Feedback} {Cooling} of a {Gram}-{Scale} {Oscillator} to 6.9 {mK}},
	volume = {99},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.99.160801},
	doi = {10.1103/PhysRevLett.99.160801},
	number = {16},
	journal = {Physical Review Letters},
	author = {Corbitt, Thomas and Wipf, Christopher and Bodiya, Timothy and Ottaway, David and Sigg, Daniel and Smith, Nicolas and Whitcomb, Stanley and Mavalvala, Nergis},
	month = oct,
	year = {2007},
	keywords = {Q dilution},
	pages = {160801}
}

@article{wilson-rae_high-q_2011,
	title = {High-\${Q}\$ {Nanomechanics} via {Destructive} {Interference} of {Elastic} {Waves}},
	volume = {106},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.106.047205},
	doi = {10.1103/PhysRevLett.106.047205},
	number = {4},
	journal = {Physical Review Letters},
	author = {Wilson-Rae, I. and Barton, R. A. and Verbridge, S. S. and Southworth, D. R. and Ilic, B. and Craighead, H. G. and Parpia, J. M.},
	month = jan,
	year = {2011},
	pages = {047205}
}

@article{cole_phonon-tunnelling_2011,
	title = {Phonon-tunnelling dissipation in mechanical resonators},
	volume = {2},
	copyright = {2011 Nature Publishing Group},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms1212},
	doi = {10.1038/ncomms1212},
	language = {en},
	urldate = {2018-05-18},
	journal = {Nature Communications},
	author = {Cole, Garrett D. and Wilson-Rae, Ignacio and Werbach, Katharina and Vanner, Michael R. and Aspelmeyer, Markus},
	month = mar,
	year = {2011},
	pages = {231}
}


@misc{zenodo_repos,
	howpublished = {Raw measurements data, analysis code to repoduce the manuscript figures, and the GDS designs of PnC membranes are available on zenodo.org, DOI:.../zenodo....},
}