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@article{nielsen2004particle,
  title={Particle precipitation in connection with KOH etching of silicon},
  author={Nielsen, C Bergenstof and Christensen, Carsten and Pedersen, Casper and Thomsen, Erik Vilain},
  journal={Journal of The Electrochemical Society},
  volume={151},
  number={5},
  pages={G338--G342},
  year={2004},
  publisher={The Electrochemical Society}
}

@article{clerk_quantum-limited_2004,
	title = {Quantum-limited position detection and amplification: A linear response perspective},
	volume = {70},
	url = {https://link.aps.org/doi/10.1103/PhysRevB.70.245306},
	doi = {10.1103/PhysRevB.70.245306},
	shorttitle = {Quantum-limited position detection and amplification},
	pages = {245306},
	number = {24},
	journal = {Physical Review B},
	shortjournal = {Phys. Rev. B},
	author = {Clerk, A. A.},
	urldate = {2020-04-27},
	year = {2004},
	note = {Publisher: American Physical Society}
}

@article{lemonde_nonlinear_2013,
	title = {Nonlinear Interaction Effects in a Strongly Driven Optomechanical Cavity},
	volume = {111},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.111.053602},
	doi = {10.1103/PhysRevLett.111.053602},
	pages = {053602},
	number = {5},
	journal = {Physical Review Letters},
	shortjournal = {Phys. Rev. Lett.},
	author = {Lemonde, Marc-Antoine and Didier, Nicolas and Clerk, Aashish A.},
	urldate = {2020-02-24},
	year = {2013}
}

@article{martin_measurement_2007,
	title = {Measurement of Energy Eigenstates by a Slow Detector},
	volume = {98},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.98.120401},
	doi = {10.1103/PhysRevLett.98.120401},
	pages = {120401},
	number = {12},
	journal = {Physical Review Letters},
	shortjournal = {Phys. Rev. Lett.},
	author = {Martin, I. and Zurek, W. H.},
	urldate = {2019-12-02},
	year = {2007}
}

@article{dutt_-chip_2015,
	title = {On-Chip Optical Squeezing},
	volume = {3},
	url = {https://link.aps.org/doi/10.1103/PhysRevApplied.3.044005},
	doi = {10.1103/PhysRevApplied.3.044005},
	pages = {044005},
	number = {4},
	journal = {Physical Review Applied},
	shortjournal = {Phys. Rev. Applied},
	author = {Dutt, Avik and Luke, Kevin and Manipatruni, Sasikanth and Gaeta, Alexander L. and Nussenzveig, Paulo and Lipson, Michal},
	urldate = {2020-05-01},
	year = {2015},
	note = {Publisher: American Physical Society}
}

@article{hoff_integrated_2015,
	title = {Integrated source of broadband quadrature squeezed light},
	volume = {23},
	rights = {\&\#169; 2015 Optical Society of America},
	issn = {1094-4087},
	url = {https://www.osapublishing.org/oe/abstract.cfm?uri=oe-23-9-12013},
	doi = {10.1364/OE.23.012013},
	pages = {12013--12036},
	number = {9},
	journal = {Optics Express},
	shortjournal = {Opt. Express, {OE}},
	author = {Hoff, Ulrich B. and Nielsen, Bo M. and Andersen, Ulrik L.},
	urldate = {2020-05-01},
	year = {2015},
	note = {Publisher: Optical Society of America}
}

@article{otterpohl_squeezed_2019,
	title = {Squeezed vacuum states from a whispering gallery mode resonator},
	volume = {6},
	rights = {\&\#169; 2019 Optical Society of America},
	issn = {2334-2536},
	url = {https://www.osapublishing.org/optica/abstract.cfm?uri=optica-6-11-1375},
	doi = {10.1364/OPTICA.6.001375},
	pages = {1375--1380},
	number = {11},
	journal = {Optica},
	shortjournal = {Optica, {OPTICA}},
	author = {Otterpohl, Alexander and Otterpohl, Alexander and Otterpohl, Alexander and Sedlmeir, Florian and Sedlmeir, Florian and Vogl, Ulrich and Vogl, Ulrich and Dirmeier, Thomas and Dirmeier, Thomas and Shafiee, Golnoush and Shafiee, Golnoush and Schunk, Gerhard and Schunk, Gerhard and Schunk, Gerhard and Strekalov, Dmitry V. and Schwefel, Harald G. L. and Schwefel, Harald G. L. and Gehring, Tobias and Andersen, Ulrik L. and Andersen, Ulrik L. and Leuchs, Gerd and Leuchs, Gerd and Marquardt, Christoph and Marquardt, Christoph},
	urldate = {2020-05-01},
	year = {2019},
	note = {Publisher: Optical Society of America}
}

@article{alnis_thermal-noise-limited_2011,
	title = {Thermal-noise-limited crystalline whispering-gallery-mode resonator for laser stabilization},
	volume = {84},
	url = {https://link.aps.org/doi/10.1103/PhysRevA.84.011804},
	doi = {10.1103/PhysRevA.84.011804},
	pages = {011804},
	number = {1},
	journal = {Physical Review A},
	shortjournal = {Phys. Rev. A},
	author = {Alnis, J. and Schliesser, A. and Wang, C. Y. and Hofer, J. and Kippenberg, T. J. and Hänsch, T. W.},
	urldate = {2020-05-01},
	year = {2011},
	note = {Publisher: American Physical Society}
}

@article{lee_spiral_2013,
	title = {Spiral resonators for on-chip laser frequency stabilization},
	volume = {4},
	rights = {2013 The Author(s)},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms3468},
	doi = {10.1038/ncomms3468},
	pages = {1--6},
	number = {1},
	journal = {Nature Communications},
	author = {Lee, Hansuek and Suh, Myoung-Gyun and Chen, Tong and Li, Jiang and Diddams, Scott A. and Vahala, Kerry J.},
	urldate = {2020-05-01},
	year = {2013},
	langid = {english}
}

@article{zurek_decoherence_2003,
	title = {Decoherence, einselection, and the quantum origins of the classical},
	volume = {75},
	url = {https://link.aps.org/doi/10.1103/RevModPhys.75.715},
	doi = {10.1103/RevModPhys.75.715},
	pages = {715--775},
	number = {3},
	journal = {Reviews of Modern Physics},
	shortjournal = {Rev. Mod. Phys.},
	author = {Zurek, Wojciech Hubert},
	urldate = {2017-05-13},
	year = {2003}
}

@article{purdy_tunable_2010,
	title = {Tunable Cavity Optomechanics with Ultracold Atoms},
	volume = {105},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.105.133602},
	doi = {10.1103/PhysRevLett.105.133602},
	pages = {133602},
	number = {13},
	journal = {Physical Review Letters},
	shortjournal = {Phys. Rev. Lett.},
	author = {Purdy, T. P. and Brooks, D. W. C. and Botter, T. and Brahms, N. and Ma, Z.-Y. and Stamper-Kurn, D. M.},
	urldate = {2020-04-30},
	year = {2010},
	note = {Publisher: American Physical Society}
}

@article{clerk_introduction_2010,
	title = {Introduction to quantum noise, measurement, and amplification},
	volume = {82},
	url = {https://link.aps.org/doi/10.1103/RevModPhys.82.1155},
	doi = {10.1103/RevModPhys.82.1155},
	pages = {1155--1208},
	number = {2},
	journal = {Reviews of Modern Physics},
	shortjournal = {Rev. Mod. Phys.},
	author = {Clerk, A. A. and Devoret, M. H. and Girvin, S. M. and Marquardt, Florian and Schoelkopf, R. J.},
	urldate = {2020-04-27},
	year = {2010},
	note = {Publisher: American Physical Society}
}

@article{vanner_selective_2011,
	title = {Selective Linear or Quadratic Optomechanical Coupling via Measurement},
	volume = {1},
	url = {http://link.aps.org/doi/10.1103/PhysRevX.1.021011},
	doi = {10.1103/PhysRevX.1.021011},
	pages = {021011},
	number = {2},
	journal = {Physical Review X},
	shortjournal = {Phys. Rev. X},
	author = {Vanner, Michael R.},
	urldate = {2016-09-28},
	year = {2011}
}

@article{huang_thermorefractive_2019,
	title = {Thermorefractive noise in silicon-nitride microresonators},
	volume = {99},
	url = {https://link.aps.org/doi/10.1103/PhysRevA.99.061801},
	doi = {10.1103/PhysRevA.99.061801},
	pages = {061801},
	number = {6},
	journal = {Physical Review A},
	shortjournal = {Phys. Rev. A},
	author = {Huang, Guanhao and Lucas, Erwan and Liu, Junqiu and Raja, Arslan S. and Lihachev, Grigory and Gorodetsky, Michael L. and Engelsen, Nils J. and Kippenberg, Tobias J.},
	urldate = {2020-04-09},
	year = {2019},
	note = {Publisher: American Physical Society}
}

@article{brawley_nonlinear_2016,
	title = {Nonlinear optomechanical measurement of mechanical motion},
	volume = {7},
	copyright = {2016 The Author(s)},
	issn = {2041-1723},
	url = {https://www.nature.com/articles/ncomms10988},
	doi = {10.1038/ncomms10988},
	number = {1},
	urldate = {2020-05-14},
	journal = {Nature Communications},
	author = {Brawley, G. A. and Vanner, M. R. and Larsen, P. E. and Schmid, S. and Boisen, A. and Bowen, W. P.},
	month = mar,
	year = {2016},
	note = {Publisher: Nature Publishing Group},
	pages = {10988}
}


@article{drake_thermal_2019,
	title = {Thermal decoherence and laser cooling of Kerr microresonator solitons},
	url = {http://arxiv.org/abs/1903.00431},
	journal = {{arXiv}:1903.00431 [physics]},
	author = {Drake, Tara E. and Stone, Jordan R. and Briles, Travis C. and Papp, Scott B.},
	urldate = {2020-05-12},
	year = {2019},
	eprinttype = {arxiv},
	eprint = {1903.00431},
	keywords = {Physics - Optics}
}

@article{kippenberg_dissipative_2018,
	title = {Dissipative {Kerr} solitons in optical microresonators},
	volume = {361},
	copyright = {Copyright © 2018, American Association for the Advancement of Science. http://www.sciencemag.org/about/science-licenses-journal-article-reuseThis is an article distributed under the terms of the Science Journals Default License.},
	issn = {0036-8075, 1095-9203},
	url = {https://science.sciencemag.org/content/361/6402/eaan8083},
	doi = {10.1126/science.aan8083},
	number = {6402},
	urldate = {2020-05-12},
	journal = {Science},
	author = {Kippenberg, Tobias J. and Gaeta, Alexander L. and Lipson, Michal and Gorodetsky, Michael L.},
	month = aug,
	year = {2018},
	pmid = {30093576}
}

@article{thompson_strong_2008,
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}


@article{gartner2018integrated,
  title={Integrated optomechanical arrays of two high reflectivity SiN membranes},
  author={Gärtner, Claus and Moura, Jo{\~a}o P and Haaxman, Wouter and Norte, Richard A and Gröblacher, Simon},
  journal={Nano Letters},
  volume={18},
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  publisher={ACS Publications}
}

@article{Lai_perturbation_1990,
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}



@article{Gorodetksy_vacuum_2010,
author = {M. L. Gorodetksy and A. Schliesser and G. Anetsberger and S. Deleglise and T. J. Kippenberg},
journal = {Opt. Express},
keywords = {Phase measurement; Fluctuations, relaxations, and noise; Optical microelectromechanical devices; Cavity quantum electrodynamics; Discrete Fourier transforms; Frequency modulation; Optical systems; Optomechanics; Phase modulation},
number = {22},
pages = {23236--23246},
publisher = {OSA},
title = {Determination of the vacuum optomechanical coupling rate using frequency noise calibration},
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year = {2010},
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}



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@article{gorodetsky_fundamental_2004,
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@article{anetsberger_near-field_2009,
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	year = {2009}
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@article{robinson_crystalline_2019,
	title = {Crystalline optical cavity at 4 K with thermal-noise-limited instability and ultralow drift},
	volume = {6},
	rights = {\&\#169; 2019 Optical Society of America},
	issn = {2334-2536},
	url = {https://www.osapublishing.org/optica/abstract.cfm?uri=optica-6-2-240},
	doi = {10.1364/OPTICA.6.000240},
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	author = {Robinson, John M. and Oelker, Eric and Milner, William R. and Zhang, Wei and Legero, Thomas and Matei, Dan G. and Riehle, Fritz and Sterr, Uwe and Ye, Jun},
	urldate = {2020-04-02},
	year = {2019},
	note = {Publisher: Optical Society of America}
}

@article{cole_tenfold_2013,
	title = {Tenfold reduction of Brownian noise in high-reflectivity optical coatings},
	volume = {7},
	rights = {2013 Nature Publishing Group},
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	year = {2013}
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@article{ye_quantum_2008,
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@article{ferguson_laser-noise-induced_1990,
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@article{zhao_wilson_suppression_2012,
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	volume = {20},
	copyright = {\&\#169; 2012 OSA},
	issn = {1094-4087},
	url = {https://www.osapublishing.org/oe/abstract.cfm?uri=oe-20-4-3586},
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@article{gorodetksy_determination_2010,
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	keywords = {Optomechanics, Discrete Fourier transforms, Frequency modulation, Cavity quantum electrodynamics, Optical systems, Phase modulation},
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}

@phdthesis{wilson_thesis_2012,
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}

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@article{braginsky_thermorefractive_2000,
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@article{sudhir_appearance_2017,
	title = {Appearance and {Disappearance} of {Quantum} {Correlations} in {Measurement}-{Based} {Feedback} {Control} of a {Mechanical} {Oscillator}},
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	url = {https://link.aps.org/doi/10.1103/PhysRevX.7.011001},
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	year = {2015},
	pages = {074001}
}

@article{bereyhi_clamp-tapering_2019,
	title = {Clamp-{Tapering} {Increases} the {Quality} {Factor} of {Stressed} {Nanobeams}},
	volume = {19},
	issn = {1530-6984},
	url = {https://doi.org/10.1021/acs.nanolett.8b04942},
	doi = {10.1021/acs.nanolett.8b04942},
	number = {4},
	urldate = {2019-07-13},
	journal = {Nano Letters},
	author = {Bereyhi, Mohammad. J. and Beccari, Alberto and Fedorov, Sergey A. and Ghadimi, Amir H. and Schilling, Ryan and Wilson, Dalziel J. and Engelsen, Nils J. and Kippenberg, Tobias J.},
	month = apr,
	year = {2019},
	pages = {2329--2333}
}

@article{fedorov_generalized_2019,
	title = {Generalized dissipation dilution in strained mechanical resonators},
	volume = {99},
	url = {https://link.aps.org/doi/10.1103/PhysRevB.99.054107},
	doi = {10.1103/PhysRevB.99.054107},
	number = {5},
	urldate = {2019-02-28},
	journal = {Physical Review B},
	author = {Fedorov, S. A. and Engelsen, N. J. and Ghadimi, A. H. and Bereyhi, M. J. and Schilling, R. and Wilson, D. J. and Kippenberg, T. J.},
	month = feb,
	year = {2019},
	pages = {054107}
} 

@article{ni_enhancement_2012,
	title = {Enhancement of {Mechanical} \${Q}\$ {Factors} by {Optical} {Trapping}},
	volume = {108},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.108.214302},
	doi = {10.1103/PhysRevLett.108.214302},
	number = {21},
	journal = {Physical Review Letters},
	author = {Ni, K.-K. and Norte, R. and Wilson, D. J. and Hood, J. D. and Chang, D. E. and Painter, O. and Kimble, H. J.},
	month = may,
	year = {2012},
	pages = {214302}
}

@article{gajo_strong_2017,
	title = {Strong 4-mode coupling of nanomechanical string resonators},
	volume = {111},
	issn = {0003-6951},
	url = {http://aip.scitation.org/doi/full/10.1063/1.4995230},
	doi = {10.1063/1.4995230},
	number = {13},
	urldate = {2018-01-31},
	journal = {Applied Physics Letters},
	author = {Gajo, Katrin and Schüz, Simon and Weig, Eva M.},
	month = sep,
	year = {2017},
	pages = {133109}
}

@article{capelle_polarimetric_2017,
	title = {Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride           resonators},
	volume = {110},
	issn = {0003-6951},
	url = {http://aip.scitation.org/doi/full/10.1063/1.4982876},
	doi = {10.1063/1.4982876},
	number = {18},
	urldate = {2017-12-14},
	journal = {Applied Physics Letters},
	author = {Capelle, T. and Tsaturyan, Y. and Barg, A. and Schliesser, A.},
	month = may,
	year = {2017},
	pages = {181106}
}

@article{ghadimi_radiation_2017,
	title = {Radiation and {Internal} {Loss} {Engineering} of {High}-{Stress} {Silicon} {Nitride} {Nanobeams}},
	issn = {1530-6984},
	url = {http://dx.doi.org/10.1021/acs.nanolett.7b00573},
	doi = {10.1021/acs.nanolett.7b00573},
	urldate = {2017-05-13},
	journal = {Nano Letters},
	author = {Ghadimi, Amir Hossein and Wilson, Dalziel Joseph and Kippenberg, Tobias J.},
	month = mar,
	year = {2017}
}

@article{reinhardt_ultralow-noise_2016,
	title = {Ultralow-{Noise} {SiN} {Trampoline} {Resonators} for {Sensing} and {Optomechanics}},
	volume = {6},
	url = {http://link.aps.org/doi/10.1103/PhysRevX.6.021001},
	doi = {10.1103/PhysRevX.6.021001},
	number = {2},
	urldate = {2016-09-19},
	journal = {Physical Review X},
	author = {Reinhardt, Christoph and Müller, Tina and Bourassa, Alexandre and Sankey, Jack C.},
	month = apr,
	year = {2016},
	keywords = {SiN damping},
	pages = {021001}
}

@article{tsaturyan_ultracoherent_2017,
	title = {Ultracoherent nanomechanical resonators via soft clamping and dissipation dilution},
	volume = {12},
	copyright = {2017 Nature Publishing Group},
	issn = {1748-3395},
	url = {https://www.nature.com/articles/nnano.2017.101},
	doi = {10.1038/nnano.2017.101},
	number = {8},
	urldate = {2017-12-01},
	journal = {Nature Nanotechnology},
	author = {Tsaturyan, Y. and Barg, A. and Polzik, E. S. and Schliesser, A.},
	month = aug,
	year = {2017},
	pages = {776},
}


@article{Purdy13b,
	Author = {Purdy, T P and Yu, P and Peterson, R W and Kampel, N S and Regal, C A},
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	Date-Modified = {2017-04-18 19:39:00 +0000},
	Doi = {10.1103/PhysRevX.3.031012},
	File = {Purdy et al. - 2013 - Physical Review X:/Users/vivisheksudhir/Documents/Papers/Zotero/storage/BGDEDS99/Purdy et al. - 2013 - Physical Review X.pdf:application/pdf},
	Journal = {Physical Review X},
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	Pages = {031012},
	Title = {Strong {Optomechanical} {Squeezing} of {Light}},
	Volume = {3},
	Year = {2013},
	Bdsk-Url-1 = {http://dx.doi.org/10.1103/PhysRevX.3.031012}} 

@article{saulson_thermal_1990,
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	Date-Added = {2017-01-20 13:44:45 +0000},
	Date-Modified = {2017-01-20 13:44:45 +0000},
	File = {Saulson - 1990 - Physical Review D:/Users/vivisheksudhir/Documents/Papers/Zotero/storage/PHHA4NPW/Saulson - 1990 - Physical Review D.pdf:application/pdf},
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	Year = {1990},
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@article{gonzalez_brownian_1995,
	Abstract = {We constructed a torsion pendulum in which the dissipation is dominated by internal friction in the fiber. We compare the measured thermal noise spectrum with the prediction from the fluctuation-dissipation theorem. The agreement is excellent. The spectrum exhibits an approximately 1f slope below resonance. We discuss the implications for interferometric gravitational wave detectors.},
	Author = {Gonz{\'a}lez, Gabriela I. and Saulson, Peter R.},
	Doi = {10.1016/0375-9601(95)00194-8},
	Issn = {0375-9601},
	Journal = {Physics Letters A},
	Month = may,
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	Urldate = {2016-12-07},
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@article{gonzalez_brownian_1994,
	Abstract = {The theory of elasticity and the fluctuation‐dissipation theorem were used to calculate the thermal noise power spectrum of an extended mass suspended by an anelastic wire. The implications for interferometric detectors of gravitational waves are discussed.},
	Author = {Gonz{\'a}lez, Gabriela I. and Saulson, Peter R.},
	Date-Modified = {2017-01-20 19:40:31 +0000},
	Doi = {10.1121/1.410467},
	Journal = {The Journal of the Acoustical Society of America},
	Journaltitle = {The Journal of the Acoustical Society of America},
	Pages = {207--212},
	Title = {Brownian motion of a mass suspended by an anelastic wire},
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	Date-Modified = {2017-01-20 19:32:20 +0000},
	Doi = {10.1103/RevModPhys.86.1391},
	Journal = {Reviews of Modern Physics},
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	Pages = {1391},
	Shortjournal = {Rev. Mod. Phys.},
	Title = {Cavity optomechanics},
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@article{wilson_measurement-based_2015,
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	Date-Modified = {2017-01-20 19:33:38 +0000},
	Doi = {10.1038/nature14672},
	Journal = {Nature},
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	Number = {7565},
	Pages = {325},
	Title = {Measurement-based control of a mechanical oscillator at its thermal decoherence rate},
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	Year = {2015},
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@article{schilling_near-field_2016,
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	Date-Modified = {2017-01-20 19:40:55 +0000},
	Doi = {10.1103/PhysRevApplied.5.054019},
	Journal = {Physical Review Applied},
	Number = {5},
	Pages = {054019},
	Title = {Near-Field Integration of a {SiN} Nanobeam and a \$\{{\textbackslash}mathrm\{{SiO}\}\}\_\{2\}\$ Microcavity for Heisenberg-Limited Displacement Sensing},
	Url = {http://link.aps.org/doi/10.1103/PhysRevApplied.5.054019},
	Volume = {5},
	Year = {2016},
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	Bdsk-Url-2 = {http://dx.doi.org/10.1103/PhysRevApplied.5.054019}}

@article{villanueva_surface_loss_2014,
	Author = {Villanueva, L. G. and Schmid, S.},
	Date-Modified = {2017-01-20 19:39:27 +0000},
	Doi = {10.1103/PhysRevLett.113.227201},
	Journal = {Physical Review Letters},
	Number = {22},
	Pages = {227201},
	Shortjournal = {Phys. Rev. Lett.},
	Title = {Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in {SiN} Micro- and Nanomechanical Resonators},
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	Volume = {113},
	Year = {2014},
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@article{ghadimi_strain_2017,
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	copyright = {Copyright © 2018 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. http://www.sciencemag.org/about/science-licenses-journal-article-reuseThis is an article distributed under the terms of the Science Journals Default License.},
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	urldate = {2018-05-18},
	journal = {Science},
	author = {Ghadimi, A. H. and Fedorov, S. A. and Engelsen, N. J. and Bereyhi, M. J. and Schilling, R. and Wilson, D. J. and Kippenberg, T. J.},
	month = may,
	year = {2018},
	pmid = {29650701},
	pages = {764--768}
}

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	title = {Theory of elasticity},
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@article{yu_control_2012,
	title = {Control of {Material} {Damping} in {High}-\${Q}\$ {Membrane} {Microresonators}},
	volume = {108},
	url = {https://link.aps.org/doi/10.1103/PhysRevLett.108.083603},
	doi = {10.1103/PhysRevLett.108.083603},
	abstract = {We study the mechanical quality factors of bilayer aluminum–silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q’s of tensioned resonator modes over a large range of frequencies. We develop a theoretical model that interprets our results and predicts the damping can be reduced significantly by patterning the metal film. Using such patterning, we fabricate Al-Si3N4 membranes with ultrahigh Q at room temperature. Our work elucidates the role of material loss in the Q of membrane resonators and informs the design of hybrid mechanical oscillators for optical-electrical-mechanical quantum interfaces.},
	number = {8},
	urldate = {2018-02-21},
	journal = {Physical Review Letters},
	author = {Yu, P.-L. and Purdy, T. P. and Regal, C. A.},
	month = feb,
	year = {2012},
	pages = {083603}
}

@article{gretarsson_dissipation_1999,
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@article{zwickl_high_2008,
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@book{braginsky_systems_1985,
	title = {Systems with Small Dissipation},
	url = {http://www.press.uchicago.edu/ucp/books/book/chicago/S/bo5973099.html},
	abstract = {Electromagnetic and mechanical oscillators are crucial in such diverse fields as electrical engineering, microwave technology, optical technology, and experimental physics. For example, such oscillators are the key elements in instruments for detecting extremely weak mechanical forces and electromagnetic signals are essential to highly stable standards of time and frequency. The central problem in developing such instruments is to construct oscillators that are as perfectly simple harmonic as possible; the largest obstacle is the oscillator's dissipation and the fluctuating forces associated with it. This book, first published in Russian in 1981 and updated with new data for this English edition, is a treatise on the sources of dissipation and other defects in mechanical and electromagnetic oscillators and on practical techniques for minimizing such defects. Written by a team of researchers from Moscow State University who are leading experts in the field, the book is a virtual encyclopedia of theoretical formulas, experimental techniques, and practical lore derived from twenty-five years of experience. Intended for the experimenter who wishes to construct near-perfect instrumentation, the book provides information on everything from the role of phonon-phonon scattering as a fundamental source of dissipation to the effectiveness of a thin film of pork fat in reducing the friction between a support wire and a mechanically oscillating sapphire crystal. The researchers that V. B. Braginsky has led since the mid-1960s are best known in the West for their contributions to the technology of gravitational-wave detection, their experimental search for quarks, their test of the equivalency principle, and their invention of new experimental techniques for high-precision measurement, including "quantum nondemolition movements." Here, for the first time, they provide a thorough overview of the practical knowledge and experimental methods that have earned them a worldwide reputation for ingenuity, talent, and successful technique.},
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	url = {http://www.nature.com/nature/journal/v452/n7183/abs/nature06715.html},
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	urldate = {2016-12-02},
	journal = {Nature},
	author = {Thompson, J. D. and Zwickl, B. M. and Jayich, A. M. and Marquardt, Florian and Girvin, S. M. and Harris, J. G. E.},
	month = mar,
	year = {2008},
	pages = {72--75}
}

@article{wilson_cavity_2009,
	title = {Cavity {Optomechanics} with {Stoichiometric} {SiN} {Films}},
	volume = {103},
	url = {http://link.aps.org/doi/10.1103/PhysRevLett.103.207204},
	doi = {10.1103/PhysRevLett.103.207204},
	number = {20},
	urldate = {2016-12-22},
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	author = {Wilson, D. J. and Regal, C. A. and Papp, S. B. and Kimble, H. J.},
	month = nov,
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	pages = {207204}
}

@article{purdy_observation_2013,
	title = {Observation of {Radiation} {Pressure} {Shot} {Noise} on a {Macroscopic} {Object}},
	volume = {339},
	copyright = {Copyright © 2013, American Association for the Advancement of Science},
	issn = {0036-8075, 1095-9203},
	url = {http://science.sciencemag.org/content/339/6121/801},
	doi = {10.1126/science.1231282},
	number = {6121},
	urldate = {2016-09-05},
	journal = {Science},
	author = {Purdy, T. P. and Peterson, R. W. and Regal, C. A.},
	month = feb,
	year = {2013},
	pmid = {23413350},
	pages = {801--804}
}

@article{wilson_measurement-based_2015,
	title = {Measurement-based control of a mechanical oscillator at its thermal decoherence rate},
	volume = {524},
	copyright = {© 2015 Nature Publishing Group, a division of Macmillan Publishers Limited. All Rights Reserved.},
	issn = {0028-0836},
	url = {http://www.nature.com/nature/journal/v524/n7565/full/nature14672.html},
	doi = {10.1038/nature14672},
	number = {7565},
	urldate = {2016-09-28},
	journal = {Nature},
	author = {Wilson, D. J. and Sudhir, V. and Piro, N. and Schilling, R. and Ghadimi, A. and Kippenberg, T. J.},
	month = aug,
	year = {2015},
	keywords = {NEMS, Quantum metrology, Quantum optics},
	pages = {325--329}
}

@article{regal_measuring_2008,
	title = {Measuring nanomechanical motion with a microwave cavity interferometer},
	volume = {4},
	copyright = {2008 Nature Publishing Group},
	issn = {1745-2481},
	url = {https://www.nature.com/articles/nphys974},
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	urldate = {2018-04-10},
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@article{lee_measurement_2008,
	title = {Measurement of the {Elastic} {Properties} and {Intrinsic} {Strength} of {Monolayer} {Graphene}},
	volume = {321},
	copyright = {American Association for the Advancement of Science},
	issn = {0036-8075, 1095-9203},
	url = {http://science.sciencemag.org/content/321/5887/385},
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	number = {5887},
	urldate = {2018-04-10},
	journal = {Science},
	author = {Lee, Changgu and Wei, Xiaoding and Kysar, Jeffrey W. and Hone, James},
	month = jul,
	year = {2008},
	pmid = {18635798},
	keywords = {2D materials, stress/strain engineering},
	pages = {385--388}
}

@article{schmid_damping_2011,
	title = {Damping mechanisms in high-\${Q}\$ micro and nanomechanical string resonators},
	volume = {84},
	url = {https://link.aps.org/doi/10.1103/PhysRevB.84.165307},
	doi = {10.1103/PhysRevB.84.165307},
	number = {16},
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@article{yamaguchi2017gaas,
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	year={2017},
	publisher={IOP Publishing},
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@article{cole2014tensile,
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@article{zabel_top-down_2017,
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	issn = {0884-2914, 2044-5326},
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	urldate = {2018-05-15},
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	author = {Zabel, Thomas and Geiger, Richard and Marin, Esteban and Müller, Elisabeth and Diaz, Ana and Bonzon, Christopher and Süess, Martin J. and Spolenak, Ralph and Faist, Jérôme and Sigg, Hans},
	month = feb,
	year = {2017},
	keywords = {semiconducting, stress/strain engineering, elastic properties, microstructure},
	pages = {726--736}
}

@article{minamisawa_top-down_2012,
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	copyright = {2012 Nature Publishing Group},
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	urldate = {2018-05-15},
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	month = oct,
	year = {2012},
	keywords = {stress/strain engineering},
	pages = {1096}
}

@article{moridi_residual_2013,
	title = {Residual stresses in thin film systems: {Effects} of lattice mismatch, thermal mismatch and interface dislocations},
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@misc{zenodo_repos,
	howpublished = {Raw measurements data, analysis code to reproduce the manuscript figures, and the GDS designs of PnC membranes are available on zenodo.org, DOI: 10.5281/zenodo.3747301}
}

@misc{specta_notations,
	howpublished = {We use two-sided spectral densities, denoted as $S_{xx}[\omega]$, in theoretical derivations and one-sided spectral densities, denoted as $S_{x}[\omega]=2S_{xx}[\omega]$ for $\omega>0$, for the presentation of experimental data.}
}