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@article{nielsen2004particle,
title={Particle precipitation in connection with KOH etching of silicon},
author={Nielsen, C Bergenstof and Christensen, Carsten and Pedersen, Casper and Thomsen, Erik Vilain},
journal={Journal of The Electrochemical Society},
volume={151},
number={5},
pages={G338--G342},
year={2004},
publisher={The Electrochemical Society}
}
@article{tsaturyan2017ultracoherent,
title={Ultracoherent nanomechanical resonators via soft clamping and dissipation dilution},
author={Tsaturyan, Yeghishe and Barg, Andreas and Polzik, Eugene S and Schliesser, Albert},
journal={Nature Nanotechnology},
volume={12},
number={8},
pages={776},
year={2017},
publisher={Nature Publishing Group}
}
@article{reinhardt2016ultralow,
title={Ultralow-noise SiN trampoline resonators for sensing and optomechanics},
author={Reinhardt, Christoph and M{\"u}ller, Tina and Bourassa, Alexandre and Sankey, Jack C},
journal={Physical Review X},
volume={6},
number={2},
pages={021001},
year={2016},
publisher={APS}
}
@article{norte2016mechanical,
title={Mechanical resonators for quantum optomechanics experiments at room temperature},
author={Norte, Richard A and Moura, Joao P and Gr{\"o}blacher, Simon},
journal={Physical Review Letters},
volume={116},
number={14},
pages={147202},
year={2016},
publisher={APS}
}
@article{gartner2018integrated,
title={Integrated optomechanical arrays of two high reflectivity SiN membranes},
author={Gärtner, Claus and Moura, Jo{\~a}o P and Haaxman, Wouter and Norte, Richard A and Gröblacher, Simon},
journal={Nano Letters},
volume={18},
number={11},
pages={7171--7175},
year={2018},
publisher={ACS Publications}
}
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